Nova Measuring Instruments and optical process control
The manufacturing of nanometric scale semiconductor structures in the chip industry requires extremely tight non-demolition process control. Modern transistors are about 10 nm wide - orders of magnitude smaller than the resolution limits of optical microscopes. Still, it is possible to tell whether a transistor is an angstrom too wide or too narrow using optical metrology tools. I will introduce Nova’s technology and describe the methods by which we can very precisely follow the chip fabrication process in real time.