Non-invasive nanoscale cross-sectional XUV imaging

Seminar
Colloquium
QUEST Center event
No
Speaker
Gerhard G. Paulus, Helmholtz Institute Jena
Date
16/05/2022 - 15:00 - 13:30Add to Calendar 2022-05-16 13:30:00 2022-05-16 15:00:00 Non-invasive nanoscale cross-sectional XUV imaging Zoom link: https://us02web.zoom.us/j/89236785442   Non-invasive nanoscale cross-sectional XUV imaging I will discuss nanoscale imaging in the extreme ultraviolet (XUV) spectral region using high-harmonics produced by femtosecond laser radiation. As opposed to other XUV imaging approaches, our scheme can exploit the entire high-harmonic spectrum. In fact, it is the XUV incarnation of optical coherence tomography, albeit vastly differently implemented due to the challenges of XUV optics. Thus, it is referred to as XUV coherence tomography, XCT. A particularly relevant application of XCT for the spectral range up to 100 eV are silicon-based samples. We have demonstrated depth resolutions of 20 nm and very high sensitivities. Buried oxide layers of a thickness of a few nanometers could be detected as well as buried monolayers of graphene. It is even possible to identify the material encapsulated in silicon and determine also properties like layer roughness without destroying the sample. A unique perspective is ultrafast imaging. Physics Building 202, Room 301 and https://us02web.zoom.us/j/89236785442 Department of Physics physics.dept@mail.biu.ac.il Asia/Jerusalem public
Place
Physics Building 202, Room 301 and https://us02web.zoom.us/j/89236785442
Abstract

Zoom link: https://us02web.zoom.us/j/89236785442

 

Non-invasive nanoscale cross-sectional XUV imaging

I will discuss nanoscale imaging in the extreme ultraviolet (XUV) spectral region using high-harmonics produced by femtosecond laser radiation. As opposed to other XUV imaging approaches, our scheme can exploit the entire high-harmonic spectrum. In fact, it is the XUV incarnation of optical coherence tomography, albeit vastly differently implemented due to the challenges of XUV optics. Thus, it is referred to as XUV coherence tomography, XCT.

A particularly relevant application of XCT for the spectral range up to 100 eV are silicon-based samples. We have demonstrated depth resolutions of 20 nm and very high sensitivities. Buried oxide layers of a thickness of a few nanometers could be detected as well as buried monolayers of graphene. It is even possible to identify the material encapsulated in silicon and determine also properties like layer roughness without destroying the sample. A unique perspective is ultrafast imaging.

Last Updated Date : 24/04/2022